q Flange size
Size
16
25
40
50
63
80
XMA
XYA
r Temperature specifications
Symbol
H0
Temperature range
5 to 60°C
5 to 150°C
y Number of auto switches/Detecting position
Symbol
A
B
C
Quantity
Without auto switch
2 pcs.
1 pc.
1 pc.
Detecting position
—
Valve open/closed
Valve open
Valve closed
•
Part numbers indicating changed seal material and leakage
Symbol
Nil
A
B
C
Changed
part
Note 2)
—
w, e
w
e
Leakage (Pa·m
3
/s or less)
Note 1)
Internal
1.3 x 10
-10
(FKM)
1.3 x 10
-8
1.3 x 10
-8
1.3 x 10
-10
(FKM)
External
1.3 x 10
-11
(FKM)
1.3 x 10
-9
1.3 x 10
-11
(FKM)
1.3 x 10
-9
u Seal material and its changed part
e Indicator/Pilot port direction
XMA
Symbol
Nil
A
F
G
J
K
L
M
Indicator
Without indicator
Pilot port direction
With indicator
Without indicator
Flange side
Flange side
Left flange surface
Rear flange surface
Right flange surface
Left flange surface
Rear flange surface
Right flange surface
XYA
Symbol
A
F
J
K
M
Indicator
Without indicator
Pilot port direction
With indicator
Without indicator
Rear flange side
Rear flange side
Left flange surface
Right flange surface
Left flange surface
Right flange surface
•Sealmaterial
Symbol
N1
Q1
R1
R2
R3
S1
T1
U1
P1
Seal material
FKM
EPDM
Barrel
Perfluoro
®
Kalrez
®
Chemraz
®
VMQ
FKM for Plasma
ULTIC
ARMOR
®
Compound No.
1349-80
∗
2101-80
∗
70W
UA4640
4079
SS592
SS630
SSE38
1232-70
∗
3310-75
∗
∗ Produced by Mitsubishi Cable Industries, Ltd.
Note 1) Values at ambient temperatures, excluding gas permeation.
Note 2)
Refer to parts number of “Construction” on the page 482 for changed part.
Number indicates parts number of “Construction” accordingly.
w Flange type
Symbol
Nil
D
C
Type
KF (NW)
K (DN)
CF
Applicable flange size
16, 25, 40, 50, 63, 80
63, 80
16 (034), 40 (070), 63 (114)
Symbol
Auto switch
Without auto switch (without built-in magnet)
Remarks
Solid state auto switch
Without auto switch (with built-in magnet)
Reed auto switch
(Flange size 16 is not available.)
Nil
D
K (DN)
KF (NW)
XMA
t
Auto switch type
XYA
Left flange surface
Right flange surface
Flange side
Rear flange surface
To order something else “Nil” (standard), list the symbols starting with
“X,” followed by each symbol for “seal material” and then “changed
parts” at last.
Ex.) XMA-16-M9NA-
XN1A
Auto switches are not applicable for high-temperature specifications (Temperature
specification H0). Standard lead wire length is 0.5 m. Add “L” to the end of the
part number when 3 m is desired, “M” when 1 m, and “Z” when 5 m.
Ex.) -M9NL
Rear flange surface
Left flange surface
Right flange surface
Flange side
Barrel Perfluoro
®
is a registered trademark of Matsumura Oil Co., Ltd.
Kalrez
®
is a registered trademark of E. I. du Pont de Nemours and
Company or its affiliates.
Chemraz
®
is a registered trademark of Greene, Tweed & Co.
ULTIC ARMOR
®
is a registered trademark of Nippon Valqua Industries, Ltd.
25, 40, 50, 63, 80
63, 80
Nil
Nil
Nil
Nil
Nil
M9N(M)(L)(Z)
M9P(M)(L)(Z)
M9B(M)(L)(Z)
A90(L)
A93(M)(L)(Z)
M9//
—
D-M9N(M)(L)(Z)
D-M9P(M)(L)(Z)
D-M9B(M)(L)(Z)
D-A90(L)
D-A93(M)(L)(Z)
—
Note) The XMAV and
XYAV series with
solenoid valve are
also available.
Please contact
SMC for details.
How to Order
In-line type
XMA
XYA
Angle type
q w e r t y
M9N16 A
A
M9N25
u
Stainless steel
High Vacuum Angle/In-line Valve
Normally Closed/Bellows Seal
XMA, XYA Series
481
