SMC Deep Vacuum Valves

Filters

• Type

  • Solenoid Valve
  • Electromagnetic valve used under high vacuum
  • Manual Vacuum Valve
  • Pilot Vacuum Valve
  • Air-Actuated Vacuum Valve

  Drawing

  Clear

• Application

  • Single Item Operating

  Drawing

  Clear

• Installation Method

  • Direct

  Drawing

  Clear

• Number of Ports

  • 2-Port Valve
  • 3-Port Valve

  Drawing

  Clear

• Solenoid Type

  • Single

  Drawing

  Clear

• Switching Type

  • 2-Position Normally Closed

  Drawing

  Clear

• Electromagnetic Valve Drive Type

  • Directly Operated
  • Air Pilot

  Drawing

  Clear

• Effective Sectional Area (mm²)

  • 0.07
  • 0.19
  • 0.38
  • 0.78
  • 4.6

  Drawing

  Clear

• Piping Opening

  • M
  • RC
  • NPT
  • One-Touch Pipe
  • Flange
  • Bite type Fittings
  • Face Seal Fitting
  • Compression Fitting

  Drawing

  Clear

• Nominal Designation of Piping Thread

  • M5
  • 1/8
  • 1/4
  • 3/8
  • M6
  • M8

  Drawing

  Clear

• Connection Tube Diameter

  • ø4
  • ø6

  Drawing

  Clear

• Flange Type

  • KF
  • K
  • CF
  • NW
  • Other

  Drawing

  Clear

• Flange Size Nominal

  • 16
  • 25
  • 40
  • 50
  • 63
  • 80

  Drawing

  Clear

• Flow Coefficient (Cv)

  • 0.0037940379
  • 0.010298103
  • 0.020596206
  • 0.0422764228
  • 84.87

  Drawing

  Clear